08 2020 档案

2.2 Synchronization of the double parallellogram
摘要：Abstract For the measurement machine NANOMEFOS (Nanometer Accuracy NOn-contact MEa-surement of Freeform Optical Surfaces), currently developed by Rens 阅读全文
posted @ 2020-08-19 22:22 lhmchn 阅读(228) 评论(0) 推荐(0)
Flexure design for precision positioningusing low-stiffness actuators
摘要：Abstract: This paper analytically investigates flexures to mechanically guide the moving partof a precision positioning system actuated by Lorentz actu 阅读全文
posted @ 2020-08-14 15:31 lhmchn 阅读(149) 评论(0) 推荐(0)
Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages
摘要：Abstract: Micromanipulation is a hot topic due to its enabling role in various research fields. In orderto perform a high precision operation at a sma 阅读全文
posted @ 2020-08-14 12:05 lhmchn 阅读(265) 评论(0) 推荐(0)