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ABSTRACTThe evaluation of the measurement uncertainty of a robust all-fiber-based low-coherence interferometer for themeasurement of absolute thicknes 阅读全文
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(12) United States Patent Spady et al. (10) Patent No.: (45) Date of Patent: Aug. 24, 2004 COMPACT ROTATING STAGE10/1991 Kato414/936 12/1998 Suzuki et 阅读全文
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(12) United States Patent Botos US006700249B1 (10) Patent No.: US Bl (45) Date of Patent: Mar. 2, 2004 (54) DIRECT DRIVE VERTICAL LIFT AND ROTATION ST 阅读全文
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US 20130033123Al (19) United States (12) Patent Application Publication (10) Pub. No.: US 2013/0033123 Al KUBOTA et al. (43) Pub. Date: Feb. 7, 2013 ( 阅读全文
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Abstract For the measurement machine NANOMEFOS (Nanometer Accuracy NOn-contact MEa-surement of Freeform Optical Surfaces), currently developed by Rens 阅读全文
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Abstract: This paper analytically investigates flexures to mechanically guide the moving partof a precision positioning system actuated by Lorentz actu 阅读全文
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Abstract: Micromanipulation is a hot topic due to its enabling role in various research fields. In orderto perform a high precision operation at a sma 阅读全文
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A separate metrology system measures the displacement of the probe relative to the product, in the plane of motion of the probe.This way most of the c 阅读全文
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Abstract: This paper analytically investigates flexures to mechanically guide the moving partof a precision positioning system actuated by Lorentz actu 阅读全文
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详情看转载：https://zhidao.baidu.com/question/1706283423474841940.html 打开此电脑-查看-隐藏的项目勾上 C:\ProgramData\FLEXnet 找到这个文件夹打开 图里面两个文件删掉。 重新激活（一定记得激活要用管理员运行，右击-管理 阅读全文